Fabrication of stationary micro-optical shutter based on semiconductor-to-metallic phase transition of W-doped VO2 active layer driven by an external voltage

Title
Fabrication of stationary micro-optical shutter based on semiconductor-to-metallic phase transition of W-doped VO2 active layer driven by an external voltage
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 26, Issue 4, Pages 763-767
Publisher
American Vacuum Society
Online
2008-09-18
DOI
10.1116/1.2870227

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