Tungsten atomic layer deposition on cobalt nanoparticles

Title
Tungsten atomic layer deposition on cobalt nanoparticles
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 26, Issue 3, Pages 430-437
Publisher
American Vacuum Society
Online
2008-05-14
DOI
10.1116/1.2902956

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