Oxidation of silicon nanowires for top-gated field effect transistors

Title
Oxidation of silicon nanowires for top-gated field effect transistors
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 26, Issue 3, Pages 370-374
Publisher
American Vacuum Society
Online
2008-05-14
DOI
10.1116/1.2899333

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