Effects of P on amorphous chemical vapor deposition Ru-P alloy films for Cu interconnect liner applications

Published 2008 View Full Article

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Title
Effects of P on amorphous chemical vapor deposition Ru-P alloy films for Cu interconnect liner applications
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 26, Issue 4, Pages 974-979
Publisher
American Vacuum Society
Online
2008-09-18
DOI
10.1116/1.2832360

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