Room Temperature Impact Consolidation (RTIC) of Fine Ceramic Powder by Aerosol Deposition Method and Applications to Microdevices

Title
Room Temperature Impact Consolidation (RTIC) of Fine Ceramic Powder by Aerosol Deposition Method and Applications to Microdevices
Authors
Keywords
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Journal
JOURNAL OF THERMAL SPRAY TECHNOLOGY
Volume 17, Issue 2, Pages 181-198
Publisher
Springer Nature
Online
2008-03-18
DOI
10.1007/s11666-008-9163-7

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