Thermal treatment-induced ductile-to-brittle transition of submicron-sized Si pillars fabricated by focused ion beam

Title
Thermal treatment-induced ductile-to-brittle transition of submicron-sized Si pillars fabricated by focused ion beam
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 106, Issue 8, Pages 081905
Publisher
AIP Publishing
Online
2015-02-26
DOI
10.1063/1.4913241

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