Experimental investigation into Ball end Magnetorheological Finishing of silicon

Published 2015 View Full Article

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Title
Experimental investigation into Ball end Magnetorheological Finishing of silicon
Authors
Keywords
Ball end Magnetorheological Finishing, Silicon wafer, Working gap, Core rotational speed, Magnetic flux density
Journal
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume 42, Issue -, Pages 218-223
Publisher
Elsevier BV
Online
2015-06-05
DOI
10.1016/j.precisioneng.2015.05.003

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