Effects of NH3 flow rate on the thermal plasma synthesis of AlN nanoparticles

Title
Effects of NH3 flow rate on the thermal plasma synthesis of AlN nanoparticles
Authors
Keywords
Aluminum nitride (AlN), Nanoparticles, Synthesis, Thermal plasma, Simulation
Journal
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 63, Issue 10, Pages 1864-1870
Publisher
Korean Physical Society
Online
2013-12-04
DOI
10.3938/jkps.63.1864

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