Journal
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 63, Issue 6, Pages 1152-1155Publisher
KOREAN PHYSICAL SOC
DOI: 10.3938/jkps.63.1152
Keywords
BCN films; Electrical conductivity; Polystyrene; Ammonia borane
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Funding
- WCU program (World Class University) through the National Research Foundation of Korea (NRF) [R31-2008-000-10029-0]
- Basic Science Research Program through the National Research Foundation of Korea (NRF) [2011-0004421]
- Ministry of Education, Science and Technology (MEST)
- Converging Research Center Program through the MEST [2012K001305]
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In this study, electrical-conductivity-controlled boron-carbonitride (BCN) films were synthesized directly on SiO2 substrates by using thermal chemical vapor deposition (TCVD) with solid mixtures containing polystyrene (PS) and ammonia borane. The BCN films had atomically smooth surfaces. The carbon content of the BCN films was simply controlled by modulating the weight of PS in the precursor mixture, which allowed the electrical conductivity of the BCN film to be controlled. In addition, we found that selection of an appropriate growth temperature determined the resulting semiconducting or metallic behavior of the BCN film.
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