Preparation of Zinc-tin-oxide Thin Film by Using an Atomic Layer Deposition Methodology

Published 2010 View Full Article

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Title
Preparation of Zinc-tin-oxide Thin Film by Using an Atomic Layer Deposition Methodology
Authors
Keywords
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Journal
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 57, Issue 6, Pages 1472-1476
Publisher
Korean Physical Society
Online
2010-12-15
DOI
10.3938/jkps.57.1472

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