Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2

Title
Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
Authors
Keywords
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Journal
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 54, Issue 3, Pages 1048-1053
Publisher
Korean Physical Society
Online
2009-06-26
DOI
10.3938/jkps.54.1048

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