Modeling the Plasma-Sheath Boundary for a Cylindrical Probe in Electronegative Plasmas

Title
Modeling the Plasma-Sheath Boundary for a Cylindrical Probe in Electronegative Plasmas
Authors
Keywords
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Journal
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 54, Issue 6, Pages 2282-2289
Publisher
Korean Physical Society
Online
2009-06-26
DOI
10.3938/jkps.54.2282

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