Fabrication and Characterization of P-implanted Si-nanowire Field-effect Transistors (n-SiNW FETs)

Title
Fabrication and Characterization of P-implanted Si-nanowire Field-effect Transistors (n-SiNW FETs)
Authors
Keywords
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Journal
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 55, Issue 1, Pages 28-31
Publisher
Korean Physical Society
Online
2009-07-13
DOI
10.3938/jkps.55.28

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