Extra-Low Temperature Growth of ZnO Thin Films by Atomic Layer Deposition

Title
Extra-Low Temperature Growth of ZnO Thin Films by Atomic Layer Deposition
Authors
Keywords
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Journal
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 53, Issue 9(5), Pages 2880-2883
Publisher
Korean Physical Society
Online
2009-06-26
DOI
10.3938/jkps.53.2880

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