Stabilizing shallow color centers in diamond created by nitrogen delta-doping using SF6 plasma treatment

Title
Stabilizing shallow color centers in diamond created by nitrogen delta-doping using SF6 plasma treatment
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 106, Issue 11, Pages 113109
Publisher
AIP Publishing
Online
2015-03-21
DOI
10.1063/1.4915305

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