Study on the Plasma-Polymer Thin Films Deposited by Using PECVD and Application Tests for Low-k Insulator

Published 2009 View Full Article

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Title
Study on the Plasma-Polymer Thin Films Deposited by Using PECVD and Application Tests for Low-k Insulator
Authors
Keywords
-
Journal
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 53, Issue 3, Pages 1634-1637
Publisher
Korean Physical Society
Online
2009-06-30
DOI
10.3938/jkps.53.1634

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