Effect of Vacuum System Base Pressure on Corrosion Resistance of Sputtered Al Thin Films

Title
Effect of Vacuum System Base Pressure on Corrosion Resistance of Sputtered Al Thin Films
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 161, Issue 4, Pages C195-C200
Publisher
The Electrochemical Society
Online
2014-02-12
DOI
10.1149/2.056404jes

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