Charge Trapping and Detrapping in nc-RuO Embedded ZrHfO High-k Thin Film for Nonvolatile Memory Applications

Published 2011 View Full Article

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Title
Charge Trapping and Detrapping in nc-RuO Embedded ZrHfO High-k Thin Film for Nonvolatile Memory Applications
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 159, Issue 3, Pages H214-H219
Publisher
The Electrochemical Society
Online
2011-12-30
DOI
10.1149/2.023203jes
References
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