Relationships between Contact Image Analysis Results for Pad Surface Texture and Removal Rate in CMP

Published 2011 View Full Article

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Title
Relationships between Contact Image Analysis Results for Pad Surface Texture and Removal Rate in CMP
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 159, Issue 2, Pages H90-H95
Publisher
The Electrochemical Society
Online
2011-12-17
DOI
10.1149/2.008202jes
References
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