Effects of Ammonia Addition on Thermal Chemical Vapor Deposition Rates and Microstructures of Carbon Films

Published 2011 View Full Article

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Title
Effects of Ammonia Addition on Thermal Chemical Vapor Deposition Rates and Microstructures of Carbon Films
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 158, Issue 7, Pages D445
Publisher
The Electrochemical Society
Online
2011-05-20
DOI
10.1149/1.3591106
References
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