High-Quality Polycrystalline Silicon Film Crystallized from Amorphous Silicon Film using NiCl2Vapor

Published 2011 View Full Article

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Title
High-Quality Polycrystalline Silicon Film Crystallized from Amorphous Silicon Film using NiCl2Vapor
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 159, Issue 1, Pages H29-H32
Publisher
The Electrochemical Society
Online
2011-12-09
DOI
10.1149/2.039201jes
References
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