Growth Mechanism of TiO[sub 2] Nanotube Arrays in Nanopores of Anodic Aluminum Oxide on Si Substrates by Atomic Layer Deposition

Title
Growth Mechanism of TiO[sub 2] Nanotube Arrays in Nanopores of Anodic Aluminum Oxide on Si Substrates by Atomic Layer Deposition
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 158, Issue 3, Pages K58
Publisher
The Electrochemical Society
Online
2011-01-04
DOI
10.1149/1.3528939

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