Adhesion Degradation and Water Diffusion in Nanoporous Organosilicate Glass Thin Film Stacks

Published 2010 View Full Article

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Title
Adhesion Degradation and Water Diffusion in Nanoporous Organosilicate Glass Thin Film Stacks
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 157, Issue 2, Pages G53
Publisher
The Electrochemical Society
Online
2010-01-01
DOI
10.1149/1.3267313
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