Tunable Work-Function Engineering of TiC–TiN Compound by Atomic Layer Deposition for Metal Gate Applications

Published 2010 View Full Article

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Title
Tunable Work-Function Engineering of TiC–TiN Compound by Atomic Layer Deposition for Metal Gate Applications
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 157, Issue 10, Pages H930
Publisher
The Electrochemical Society
Online
2010-08-30
DOI
10.1149/1.3459932
References
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