Properties of Ultrathin High Permittivity (Nb[sub 1−x]Ta[sub x])[sub 2]O[sub 5] Films Prepared by Aqueous Chemical Solution Deposition

Authors

Keywords

Journal

Volume 157, Issue 1, Pages G13

Publisher

The Electrochemical Society

Online

2009-12-04

DOI

10.1149/1.3247348

References

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