Ge Epitaxial Growth on GaAs Substrates for Application to Ge-Source/Drain GaAs MOSFETs

Published 2009 View Full Article

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Title
Ge Epitaxial Growth on GaAs Substrates for Application to Ge-Source/Drain GaAs MOSFETs
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 157, Issue 1, Pages H27
Publisher
The Electrochemical Society
Online
2009-12-04
DOI
10.1149/1.3246000
References
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