Electrochemically Enhanced Wet Cleaning of Ru Capping Thin Film for EUV Lithography Reflector

Title
Electrochemically Enhanced Wet Cleaning of Ru Capping Thin Film for EUV Lithography Reflector
Authors
Keywords
-
Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 157, Issue 4, Pages H414
Publisher
The Electrochemical Society
Online
2010-03-15
DOI
10.1149/1.3298727

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