Study of the Ge Wafer Surface Hydrophilicity after Low-Temperature Plasma Activation

Published 2009 View Full Article

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Title
Study of the Ge Wafer Surface Hydrophilicity after Low-Temperature Plasma Activation
Authors
Keywords
-
Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 156, Issue 5, Pages H307
Publisher
The Electrochemical Society
Online
2009-04-01
DOI
10.1149/1.3089363

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