Investigation of Carbon Nanotube Growth on Multimetal Layers for Advanced Interconnect Applications in Microelectronic Devices

Published 2009 View Full Article

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Title
Investigation of Carbon Nanotube Growth on Multimetal Layers for Advanced Interconnect Applications in Microelectronic Devices
Authors
Keywords
-
Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 156, Issue 3, Pages K23
Publisher
The Electrochemical Society
Online
2009-01-31
DOI
10.1149/1.3060347

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