Uniformity Effects when Electrodepositing Cu onto Resistive Substrates in the Presence of Organic Additives

Published 2008 View Full Article

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Title
Uniformity Effects when Electrodepositing Cu onto Resistive Substrates in the Presence of Organic Additives
Authors
Keywords
-
Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 155, Issue 4, Pages D302
Publisher
The Electrochemical Society
Online
2008-03-08
DOI
10.1149/1.2837857

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