Enhanced Electrodeposition of Cu into Recessed Features via Topographically Selective Ozonolysis of Adsorbed Accelerator

Title
Enhanced Electrodeposition of Cu into Recessed Features via Topographically Selective Ozonolysis of Adsorbed Accelerator
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 155, Issue 9, Pages D608
Publisher
The Electrochemical Society
Online
2008-07-29
DOI
10.1149/1.2952524

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