Improved Electrical Properties of Gd[sub 2]O[sub 3]∕GaAs Capacitor with Modified Wet-Chemical Clean and Sulfidization Procedures

Title
Improved Electrical Properties of Gd[sub 2]O[sub 3]∕GaAs Capacitor with Modified Wet-Chemical Clean and Sulfidization Procedures
Authors
Keywords
-
Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 155, Issue 3, Pages G56
Publisher
The Electrochemical Society
Online
2008-03-21
DOI
10.1149/1.2823454

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