Comparison of Electrolyte Performance for Ta[sub 2]O[sub 5] Thin Films Produced by Pulsed and Continuous Wave PECVD

Published 2008 View Full Article

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Title
Comparison of Electrolyte Performance for Ta[sub 2]O[sub 5] Thin Films Produced by Pulsed and Continuous Wave PECVD
Authors
Keywords
-
Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 155, Issue 6, Pages J168
Publisher
The Electrochemical Society
Online
2008-05-04
DOI
10.1149/1.2901139

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