Sputtering of Aluminum Cathodes on OLEDs Using Linear Facing Target Sputtering with Ladder-Type Magnet Arrays

Published 2008 View Full Article

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Title
Sputtering of Aluminum Cathodes on OLEDs Using Linear Facing Target Sputtering with Ladder-Type Magnet Arrays
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 155, Issue 7, Pages J187
Publisher
The Electrochemical Society
Online
2008-05-28
DOI
10.1149/1.2908864

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