Silicon Orientation Effects in the Atomic Layer Deposition of Hafnium Oxide

Published 2007 View Full Article

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Title
Silicon Orientation Effects in the Atomic Layer Deposition of Hafnium Oxide
Authors
Keywords
-
Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 155, Issue 2, Pages G9
Publisher
The Electrochemical Society
Online
2007-12-27
DOI
10.1149/1.2806093

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