Electrical Double Layer Catalyzed Wet-Etching of Silicon Dioxide

Published 2009 View Full Article

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Title
Electrical Double Layer Catalyzed Wet-Etching of Silicon Dioxide
Authors
Keywords
-
Journal
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
Volume 131, Issue 47, Pages 17034-17035
Publisher
American Chemical Society (ACS)
Online
2009-06-02
DOI
10.1021/ja903333s

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