Zeolite-Inspired Low-kDielectrics Overcoming Limitations of Zeolite Films

Published 2008 View Full Article

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Title
Zeolite-Inspired Low-kDielectrics Overcoming Limitations of Zeolite Films
Authors
Keywords
-
Journal
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
Volume 130, Issue 51, Pages 17528-17536
Publisher
American Chemical Society (ACS)
Online
2008-11-21
DOI
10.1021/ja8066572

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