Processing Technologies for High-Permittivity Thin Films in Capacitor Applications

Published 2010 View Full Article

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Title
Processing Technologies for High-Permittivity Thin Films in Capacitor Applications
Authors
Keywords
-
Journal
JOURNAL OF THE AMERICAN CERAMIC SOCIETY
Volume 93, Issue 12, Pages 3935-3954
Publisher
Wiley
Online
2010-12-02
DOI
10.1111/j.1551-2916.2010.04211.x

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