Elasto-Capillary Folding Using Stop-Programmable Hinges Fabricated by 3D Micro-Machining

State-of-the-art silicon device miniaturization technology and its challenges

(2014) Changhwan Shin   IEICE Electronics Express

Controllable elastocapillary folding of three-dimensional micro-objects by through-wafer filling

(2014) A. Legrain et al.   JOURNAL OF APPLIED PHYSICS

Femtosecond laser 3D micromachining: a powerful tool for the fabrication of microfluidic, optofluidic, and electrofluidic devices based on glass

(2014) Koji Sugioka et al.   LAB ON A CHIP

Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon

(2013) Erwin J W Berenschot et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Wafer-scale fabrication of nanoapertures using corner lithography

(2013) Narges Burouni et al.   NANOTECHNOLOGY

Bioinspired Microorigami by Self-Folding Polymer Films

(2012) Leonid Ionov   MACROMOLECULAR CHEMISTRY AND PHYSICS

Self-folding thin-film materials: From nanopolyhedra to graphene origami

(2012) Vivek B. Shenoy et al.   MRS BULLETIN

3D Nanofabrication of Fluidic Components by Corner Lithography

(2012) Erwin J. W. Berenschot et al.   Small

Soft microorigami: self-folding polymer films

(2011) Leonid Ionov   Soft Matter

Self-folding all-polymer thermoresponsive microcapsules

(2011) Georgi Stoychev et al.   Soft Matter

Self-folding of polymer sheets using local light absorption

(2011) Ying Liu et al.   Soft Matter

Self-folding devices and materials for biomedical applications

(2011) Christina L. Randall et al.   TRENDS IN BIOTECHNOLOGY

Curving Nanostructures Using Extrinsic Stress

(2010) Jeong-Hyun Cho et al.   ADVANCED MATERIALS

Elastocapillary fabrication of three-dimensional microstructures

(2010) J. W. van Honschoten et al.   APPLIED PHYSICS LETTERS

Three-Dimensional Fabrication at Small Size Scales

(2010) Timothy G. Leong et al.   Small

Capillarity induced folding of elastic sheets

(2009) C. Py et al.   European Physical Journal-Special Topics

Hierarchical self-assembly of complex polyhedral microcontainers

(2009) David J Filipiak et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Self-assembly from milli- to nanoscales: methods and applications

(2009) M Mastrangeli et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Black silicon method: X. A review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment

(2009) H V Jansen et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Template-Assisted Three-Dimensional Nanolithography via Geometrically Irreversible Processing

(2009) Xindi Yu et al.   NANO LETTERS

Self-Assembly of Lithographically Patterned Nanoparticles

(2009) Jeong-Hyun Cho et al.   NANO LETTERS

Voxels: volume-enclosing microstructures

(2008) Rob Gagler et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Femtosecond laser micromachining in transparent materials

(2008) Rafael R. Gattass et al.   Nature Photonics

Challenges and breakthroughs in recent research on self-assembly

(2008) Katsuhiko Ariga et al.   SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS

Thin Film Stress Driven Self-Folding of Microstructured Containers

(2008) Timothy G. Leong et al.   Small