Electron dynamics and frequency coupling in a radio-frequency capacitively biased planar coil inductively coupled plasma system

Published 2015 View Full Article

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Title
Electron dynamics and frequency coupling in a radio-frequency capacitively biased planar coil inductively coupled plasma system
Authors
Keywords
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Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 24, Issue 4, Pages 044007
Publisher
IOP Publishing
Online
2015-07-15
DOI
10.1088/0963-0252/24/4/044007

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