Effects of Ar and O2 Plasma Etching on Parylene C: Topography versus Surface Chemistry and the Impact on Cell Viability
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Title
Effects of Ar and O2
Plasma Etching on Parylene C: Topography versus Surface Chemistry and the Impact on Cell Viability
Authors
Keywords
-
Journal
Plasma Processes and Polymers
Volume 13, Issue 3, Pages 324-333
Publisher
Wiley
Online
2015-08-17
DOI
10.1002/ppap.201500053
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