Effect of low-damage inductively coupled plasma on shallow nitrogen-vacancy centers in diamond
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Title
Effect of low-damage inductively coupled plasma on shallow nitrogen-vacancy centers in diamond
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 107, Issue 7, Pages 073107
Publisher
AIP Publishing
Online
2015-08-19
DOI
10.1063/1.4929356
References
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Related references
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