Thermoelastic damping in the contour-mode vibrations of micro- and nano-electromechanical circular thin-plate resonators

Title
Thermoelastic damping in the contour-mode vibrations of micro- and nano-electromechanical circular thin-plate resonators
Authors
Keywords
-
Journal
JOURNAL OF SOUND AND VIBRATION
Volume 313, Issue 1-2, Pages 77-96
Publisher
Elsevier BV
Online
2008-03-07
DOI
10.1016/j.jsv.2007.11.035

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