Synthesis and structure features of composite silicate and hybrid TEOS-derived thin films doped by inorganic and organic additives

Title
Synthesis and structure features of composite silicate and hybrid TEOS-derived thin films doped by inorganic and organic additives
Authors
Keywords
Sol–gel synthesis, Thin silicate films, Organic–inorganic films, Inorganic dopants, Organic modifiers
Journal
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY
Volume 68, Issue 3, Pages 387-410
Publisher
Springer Nature
Online
2013-04-04
DOI
10.1007/s10971-013-3026-5

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