Effect of ytterbium inclusion in hafnium oxide on the structural and electrical properties of the high-k gate dielectric

Published 2014 View Full Article

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Title
Effect of ytterbium inclusion in hafnium oxide on the structural and electrical properties of the high-k gate dielectric
Authors
Keywords
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Journal
JOURNAL OF RARE EARTHS
Volume 32, Issue 6, Pages 580-584
Publisher
Elsevier BV
Online
2014-06-07
DOI
10.1016/s1002-0721(14)60111-3

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