Plasma enhanced chemical vapor deposition silicon nitride for a high-performance lithium ion battery anode

Title
Plasma enhanced chemical vapor deposition silicon nitride for a high-performance lithium ion battery anode
Authors
Keywords
-
Journal
JOURNAL OF POWER SOURCES
Volume 269, Issue -, Pages 520-525
Publisher
Elsevier BV
Online
2014-07-10
DOI
10.1016/j.jpowsour.2014.06.135

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