Post-growth annealing study of heavily Ga-doped zinc oxide grown by radio frequency magnetron sputtering

Published 2013 View Full Article

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Title
Post-growth annealing study of heavily Ga-doped zinc oxide grown by radio frequency magnetron sputtering
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 46, Issue 13, Pages 135104
Publisher
IOP Publishing
Online
2013-03-01
DOI
10.1088/0022-3727/46/13/135104

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