Ozone-assisted atomic layer deposited ZnO thin films for multifunctional device applications

Published 2013 View Full Article

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Title
Ozone-assisted atomic layer deposited ZnO thin films for multifunctional device applications
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 46, Issue 47, Pages 475101
Publisher
IOP Publishing
Online
2013-10-29
DOI
10.1088/0022-3727/46/47/475101

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