Regimes of leakage current in ALD-processed Al2O3thin-film layers

Published 2013 View Full Article

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Title
Regimes of leakage current in ALD-processed Al2O3thin-film layers
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 46, Issue 15, Pages 155302
Publisher
IOP Publishing
Online
2013-03-18
DOI
10.1088/0022-3727/46/15/155302

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