Realization of an atomically flat surface of diamond using dressed photon–phonon etching

Title
Realization of an atomically flat surface of diamond using dressed photon–phonon etching
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 45, Issue 47, Pages 475302
Publisher
IOP Publishing
Online
2012-10-30
DOI
10.1088/0022-3727/45/47/475302

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